JPH0526502Y2 - - Google Patents

Info

Publication number
JPH0526502Y2
JPH0526502Y2 JP1988083148U JP8314888U JPH0526502Y2 JP H0526502 Y2 JPH0526502 Y2 JP H0526502Y2 JP 1988083148 U JP1988083148 U JP 1988083148U JP 8314888 U JP8314888 U JP 8314888U JP H0526502 Y2 JPH0526502 Y2 JP H0526502Y2
Authority
JP
Japan
Prior art keywords
conductive frame
piezoelectric film
outer conductive
inner conductive
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988083148U
Other languages
English (en)
Japanese (ja)
Other versions
JPH025029U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988083148U priority Critical patent/JPH0526502Y2/ja
Publication of JPH025029U publication Critical patent/JPH025029U/ja
Application granted granted Critical
Publication of JPH0526502Y2 publication Critical patent/JPH0526502Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP1988083148U 1988-06-23 1988-06-23 Expired - Lifetime JPH0526502Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988083148U JPH0526502Y2 (en]) 1988-06-23 1988-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988083148U JPH0526502Y2 (en]) 1988-06-23 1988-06-23

Publications (2)

Publication Number Publication Date
JPH025029U JPH025029U (en]) 1990-01-12
JPH0526502Y2 true JPH0526502Y2 (en]) 1993-07-05

Family

ID=31307871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988083148U Expired - Lifetime JPH0526502Y2 (en]) 1988-06-23 1988-06-23

Country Status (1)

Country Link
JP (1) JPH0526502Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139664A (en) * 1981-02-24 1982-08-28 Nissan Motor Co Ltd Piezoelectric type acceleration detecting pickup
JPS6021935U (ja) * 1983-07-21 1985-02-15 松下電器産業株式会社 角加速度型振動検出装置

Also Published As

Publication number Publication date
JPH025029U (en]) 1990-01-12

Similar Documents

Publication Publication Date Title
US12276675B2 (en) Inertial sensor and inertial measurement unit
US20050274185A1 (en) Micro accelermoter
JPH0526502Y2 (en])
CN100443866C (zh) 组合式矢量水听器装置
WO2023151129A1 (zh) 一种三轴压阻式加速度计
JPS59158566A (ja) 半導体加速度センサ
JPS63118667A (ja) 三次元加速度センサ
CN1296727C (zh) 一种三分量振动检测装置
EP0007583B1 (en) Change of angular acceleration sensor
JP3010725B2 (ja) 半導体加速度センサ
JPH08211091A (ja) 半導体加速度検出装置
JPS59204732A (ja) ロ−ドセルユニツト
JP3229706B2 (ja) 感震器
JPH0979900A (ja) サーボ型速度・変位センサ
CN219590344U (zh) 一种三轴向冲击测量压电加速度传感器
JPH109889A (ja) 慣性センサ装置
JPS5954237U (ja) 振動制御装置
JPH049673A (ja) 半導体加速度センサ
JPH0230781Y2 (en])
US20240035879A1 (en) Vibration detector, sound wave detector, microphone, and wearable device
JPH06163937A (ja) 半導体加速度センサー
JPH0144925Y2 (en])
JPS59114411A (ja) 磁気軸受装置における変位検出方法
JPH0520991Y2 (en])
JPS60133333A (ja) 圧力センサ